| 摘要 |
<p>A liquid feeding device capable of feeding liquid at a rate of several νL to several hundred νL per second using a micro diaphragm pump of several ten mm square, wherein an inlet valve which is small in resistance when liquid comes into it and large when liquid goes out of it is formed integrally with an outlet valve which is small in resistance when liquid goes out of it to the atmosphere and large when liquid comes into it so as to easily remove air bubbles inside a liquid feeding chamber, and the shape of the liquid feeding chamber is formed so that the area of the chamber is increased from a liquid inlet side to a liquid outlet side, a parallel part is provided in the chamber between the inlet and outlet sides, and its area is reduced from the parallel part to the outlet side.</p> |
