| 摘要 |
Production of oxidic protective layers comprises applying layers to a material using physical deposition in the vapor phase, in which a CO, CO2 and/or a gas mixture containing CO2 and/or CO is introduced to the deposition chamber before and/or during the deposition. Deposition of solid or liquid starting material containing a condensable oxide-forming element or a compound of it is then carried out, the element having a larger affinity to oxygen than carbon. Preferred Features: Oxygen, nitrogen, hydrogen, hydrocarbons and/or inert gas are introduced to the deposition chamber. The carbon oxide is partially or completely ionized in the atmosphere.
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