发明名称 Remover composition
摘要 A remover composition obtained by adding 1 to 90% by weight of a cyclic urea compound represented by the following general formula (I): wherein, each of R1 and R2 independently represents a hydrogen atom, hydroxyl group, carboxyl group or alkyl group which may be substituted, and Z represents an oxygen atom or sulfur atom.
申请公布号 US2001021488(A1) 申请公布日期 2001.09.13
申请号 US20000742085 申请日期 2000.12.22
申请人 ICHIKI NAOKI 发明人 ICHIKI NAOKI
分类号 H01L21/027;G03F7/42;(IPC1-7):G03F7/32;G03F7/30 主分类号 H01L21/027
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