发明名称 |
Phase mask |
摘要 |
The phase mask is provided for illuminating a photo-sensitive layer in a photolithography process for producing integrated circuits with a predetermined pattern of optically transmissive regions. The phase mask is configured, in zones in which the distances between neighboring regions in at least one geometrical direction are less than a predetermined limiting distance, in each case as an alternating phase mask. The zones with isolated contact windows are in each case configured as a halftone phase mask or a chromeless phase mask.
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申请公布号 |
US2001021476(A1) |
申请公布日期 |
2001.09.13 |
申请号 |
US20010761810 |
申请日期 |
2001.01.16 |
申请人 |
GANS FRITZ;GRIESINGER UWE;PFORR RAINER |
发明人 |
GANS FRITZ;GRIESINGER UWE;PFORR RAINER |
分类号 |
G03F1/00;(IPC1-7):G03B27/42;G03F9/00;G21K5/10;H01J37/08 |
主分类号 |
G03F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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