发明名称 PLASMA BASED PROCESS FOR PHOTONIC INTEGRATION
摘要 <p>A method of manufacturing a photonic integrated circuit including quantum wells, comprises the step of quantum well intermixing by subjecting the quantum well region to a plasma, eg. an Argon plasma, followed by annealing the structure, to achieve a desired bandgap.</p>
申请公布号 WO2001067569(A1) 申请公布日期 2001.09.13
申请号 SG2000000039 申请日期 2000.03.08
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