发明名称 DIAMOND-LIKE GLASS THIN FILMS
摘要 <p>A diamond-like glass film is disclosed. In specific implementations, the film includes a diamond-like glass containing at least about 30 atomic percent carbon, at least about 25 atomic percent silicon, and less than or equal to about 45 atomic percent oxygen on a hydrogen-free basis. The diamond-like glass film may be applied to various substrates. The invention is also directed to articles having a diamond-like glass film, methods of making the articles, and apparatus for making the film and articles.</p>
申请公布号 WO2001066820(A1) 申请公布日期 2001.09.13
申请号 US2000027885 申请日期 2000.10.10
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址