APPARATUS FOR PULLING SILICON SINGLE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for pulling a silicon single crystal in which the apparatus has the durability, the exchange is not required, the maintenance expenditures are reduced and the productivity of silicon single crystal pulling is high. SOLUTION: This apparatus for pulling the silicon single crystal comprises a state detecting means 11 for detecting the state information sent from a rotating member 4 provided in a furnace body 2 or outside the furnace body 2 and a noncontact transmitting means 13 for sending the state information from the state detecting means 11 in a noncontact state to a controller 12 arranged outside the furnace body 2 and is capable of controlling the state of the member 4 provided in the furnace body 2 or outside the furnace body 2 with the controller 12 based on the state information from the state detecting means 11 and the noncontact transmitting means 13 in the apparatus for pulling the silicon single crystal according to the CZ process.