| 发明名称 |
ELECTRON BEAM APPARATUS AND IMAGE FORMING APPARATUS |
| 摘要 |
An electron beam apparatus comprises an electron source having an electron-emitting device, an electrode for controlling an electron beam emitted from the electron source, a target to be irradiated with an electron beam emitted from the electron source and a spacer arranged between the electron source and the electrode. The spacer has a semiconductor film on the surface thereof that is electrically connected to said electron source and said electrode.
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| 申请公布号 |
CA2152740(C) |
申请公布日期 |
2001.09.11 |
| 申请号 |
CA19952152740 |
申请日期 |
1995.06.27 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SANO, YOSHIHISA;MITSUTAKE, HIDEAKI;NAKAMURA, NAOTO;KAWATE, SHINICHI |
| 分类号 |
H01J5/03;H01J9/18;H01J9/24;H01J29/02;H01J29/86;H01J29/87;H01J31/12;(IPC1-7):H01J31/10;H01J29/08;H01J29/10;H01J29/12;H01J29/20;H01J29/30 |
主分类号 |
H01J5/03 |
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