发明名称 Semiconductor device with silicide layers and fabrication method thereof
摘要 A semiconductor device is provided, which is capable of high-speed operation of MOSFETs in a device section while suppressing the current leakage of MOSFETs in another device section even if the device is further miniaturized. This device is comprised of a semiconductor substrate, a first section defined on the substrate, a second section defined on the substrate, and a dielectric masking layer covering the first section while uncovering the second section. The first section includes a first MOSFET with a first pair of source/drain regions, a first gate insulating layer formed on the substrate, and a first gate electrode formed on the first gate insulating layer. No silicide layer is incorporated in each of the first pair of source/drain regions. The first MOSFET is covered with the masking layer in such a way that the first pair of source/drain regions of the first MOSFET are contacted with the masking layer. The second section includes a second MOSFET with a second pair of source/drain regions, a second gate insulating layer, formed on the substrate, and a second gate electrode formed on the second gate insulating layer. A silicide layer is incorporated in each of the second pair of source/drain regions.
申请公布号 US6287911(B1) 申请公布日期 2001.09.11
申请号 US19990260349 申请日期 1999.03.02
申请人 NEC CORPORATION 发明人 NOBUSAWA HAJIME
分类号 H01L27/04;H01L21/28;H01L21/285;H01L21/768;H01L21/822;H01L21/8234;H01L21/8242;H01L27/10;(IPC1-7):H01L21/824;H01L21/336;H01L29/792 主分类号 H01L27/04
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