| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction unit reduced in the number of parts to be made small-sized and lightweight, generating no abnormal sound or dust because there is no movable part and high in operation speed. SOLUTION: The suction unit is constituted of a chuck plate, the suction pad attaching holder attached to the chuck plate and having a cylindrical suction pad attaching tool, the shock absorbing member made of a soft synthetic resin attached to the suction pad attaching tool and having a bellows-like extension and contraction part and the suction pad made of a soft synthetic resin connected to the shock absorbing member. The suction pad has an annular shape and has the annular suction part provided to the front of the suction pad and a plurality of the suction air vent holes communicating with suction part and the shock absorbing member is connected to the suction air vent holes.
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