QUARTZ ELEMENT PLATE MACHINING DEVICE, AND ON-MACHINE MEASUREMENT AND CONTROL METHOD FOR RESONANCE FREQUENCY OF QUARTZ ELEMENT PLATE

摘要

PROBLEM TO BE SOLVED: To provide a quartz element plate machining device capable of efficiently and precisely machining the quartz element plate of special shape, continuously performing a rough machining to a finish machining with the same arrangement, measuring the resonance frequency on-machine, and setting a precise depth of cut, and an on-machine measurement and control method for resonance frequency of quartz element plate. SOLUTION: This method comprises (A) mounting a quartz element plate 1 as workpiece on an ELID grinding device 10 capable of grinding a workpiece while electrolytically dressing the work surface of a conductive grinding wheel 12 through a conductive holder 22 in such a manner as to be capable of resonating, (B) bringing a frequency measuring electrode 24 into contact with the work surface of the quartz element plate during or after the grinding work of the quartz element plate, (C) applying a prescribed voltage between the holder and the electrode to measure the resonance frequency of the quartz element plate, and (D) calculating a necessary depth of cut A from the measured resonance frequency.