发明名称 ULTRASONIC OSCILLATION DEVICE AND ULTRASONIC OSCILLATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an ultrasonic oscillation device constituted in such a manner that various oscillation waveforms may be combined in order to enhance the cleaning effect of an object to be cleaned. SOLUTION: A high-frequency oscillator of the ultrasonic oscillation device which outputs high-frequency electric power to vibrate a high-frequency vibrator 12 is provided with a first switch 48 for selectively setting the wavelength of the high-frequency electric power outputted from the high-frequency oscillator at continuous waves and pulse waves.
申请公布号 JP2001246319(A) 申请公布日期 2001.09.11
申请号 JP20000065065 申请日期 2000.03.09
申请人 SHIBAURA MECHATRONICS CORP 发明人 ISO AKINORI;SATO OSAMU
分类号 B08B3/12;B06B1/02;H01L21/304;(IPC1-7):B06B1/02 主分类号 B08B3/12
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