发明名称 |
ULTRASONIC OSCILLATION DEVICE AND ULTRASONIC OSCILLATION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic oscillation device constituted in such a manner that various oscillation waveforms may be combined in order to enhance the cleaning effect of an object to be cleaned. SOLUTION: A high-frequency oscillator of the ultrasonic oscillation device which outputs high-frequency electric power to vibrate a high-frequency vibrator 12 is provided with a first switch 48 for selectively setting the wavelength of the high-frequency electric power outputted from the high-frequency oscillator at continuous waves and pulse waves.
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申请公布号 |
JP2001246319(A) |
申请公布日期 |
2001.09.11 |
申请号 |
JP20000065065 |
申请日期 |
2000.03.09 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
ISO AKINORI;SATO OSAMU |
分类号 |
B08B3/12;B06B1/02;H01L21/304;(IPC1-7):B06B1/02 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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