发明名称 Semiconductor device and manufacturing method therefor
摘要 In a flash memory that has a floating gate that is formed by a polysilicon layer having grains, a gate electrode is formed on a gate oxide film that is provided on a semiconductor substrate, this gate electrode being formed as a multilayer structure by a polysilicon layer that has grains and at least one more polysilicon layer.
申请公布号 US6287915(B1) 申请公布日期 2001.09.11
申请号 US19980196417 申请日期 1998.11.19
申请人 NEC CORPORATION 发明人 MURAMATSU SATORU
分类号 H01L29/43;H01L21/28;H01L21/8247;H01L27/115;H01L29/423;H01L29/49;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/336 主分类号 H01L29/43
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