| 摘要 |
When forming a floating-type magnetic head slider for a hard disk drive or the like using dry etching, a method for manufacturing the magnetic head slider provides a method for adhering the slider being processed to an appropriate processing fixture, and when a plurality of magnetic head sliders are being processed at one time, a row (bar) array of sliders that is prepared beforehand is adhered to a metal or ceramic base, after which a dry etching method is used to form the air bearing, dry film photo-resist being used for the adhering of the row and the base. Ion milling or reactive ion etching (RIE) can be used as the dry etching method.
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