| 摘要 |
An improved restraining clip for holding fragile substrates has been invented. The clip can be used to provide a force on the backside of substrates during processing. The invention has a compound spring mechanism, effectively uncoupling the force used to hold the substrate from that applied by an operator to move the clip. The preferred configuration incorporates a multiple leaf spring for providing force to the substrate, a coil spring to hold the clip in place, and a lever arm for the operator to provide lifting and turning forces on the clip. This combination of features allows the clip to be used on fragile substrates, such as Ga-As, which are easily damaged by other clips.
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