发明名称 Method of forming a superconductor
摘要 Disclosed herein is a method of forming a superconductor, comprising the steps of: providing a substrate and exposing the substrate to a first atmosphere, including precursors to form a first epitaxial layer segment. The first layer segment is then exposed to a second atmosphere, including precursors to form a second epitaxial layer segment, and the second layer segment is exposed to a third atmosphere including precursors to form a third epitaxial layer segment. Each of the first and third layer segments are each formed from a superconductor material and the second layer segment is formed from a material different from the first and third layer segments and the first, second and third layer segments have a collective thickness, the third layer segment having an outer surface with a roughness which is less than that of a single layer of the superconductor material with a thickness equal to the collective thickness.
申请公布号 US6287969(B1) 申请公布日期 2001.09.11
申请号 US19990306310 申请日期 1999.05.06
申请人 MCMASTER UNIVERSITY 发明人 HUGHES ROBERT A.;TURNER PATRICK J.;PRESTON JOHN S
分类号 H01L39/12;H01L39/24;(IPC1-7):H01L21/44 主分类号 H01L39/12
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