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发明名称
摘要
申请公布号
JP3206921(B2)
申请公布日期
2001.09.10
申请号
JP19970527888
申请日期
1997.01.30
申请人
发明人
分类号
H01L21/8247;H01L21/28;H01L21/316;H01L21/336;H01L21/8242;H01L27/108;H01L27/115;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/824;H01L21/824
主分类号
H01L21/8247
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代理人
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