INSPECTION DEVICE FOR WAVE LENGTH CHARACTERISTIC OF OPTICAL COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide an inspection device for wave length characteristics of an optical component accurately measuring the wave characteristics without staining the sample after irradiation of the laser light. SOLUTION: This length inspection device for the optical component applying an irradiation light 11 to a sample optical component 25 or an inspection object, measuring the wave length characteristics of the sample optical component 25 after the irradiation, and inspecting the sample optical component is characterized of measuring the wave length characteristics with the sample optical component 25 set in an environment approximately similar to the irradiation of the irradiation light 11.