发明名称 PUSH-TYPE SCHEDULING FOR SEMICONDUCTOR FABRICATION
摘要 <p>PURPOSE: A push-type scheduling for semiconductor fabrication is provided to efficiently utilize the production line, and control the flow of product through the production line by determining that a cleared trajectory through all processing nodes subsequent to the bottleneck processing node is available. CONSTITUTION: A determination is made whether the queue is full(S501). The determination may be performed by considering a property of the queue, such as the instantaneous size, i.e. the number of product in the queue, in relation to a fixed limit of the number of product that can be present in the queue at any time. The process determines how many product are in the queue and compares it to the fixed limit. In the case that a determination is made that the queue is not full, then a new product is added to the queue(S502). New product is added to the queue until the queue size exceeds the fixed limit, at which time trajectory calculations are performed for the product in the queue.</p>
申请公布号 KR20010085714(A) 申请公布日期 2001.09.07
申请号 KR20010010348 申请日期 2001.02.28
申请人 CANON KABUSHIKI KAISHA 发明人 BROWNING RAYMOND
分类号 H01L21/02;G05B19/418;H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/02
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