POSITION MEASURING APPARATUS AND ALIGNER

摘要

A position measuring apparatus for measuring the positional information on a mark put on an object at high accuracy, and an aligner that conducts accurate alignment for exposure based on the highly accurate positional information obtained through the position measuring apparatus and realizes microfabrication. The positional information measuring apparatus converts the image (Im1) of an alignment mark, formed on the imaging plane (F1) of an imaging device, into image information while scanning it in the scanning direction (SC1) and then processes the image information to measure the positional of an alignment mark wherein the direction (D11) for measuring the image (Im1) of the alignment mark is set orthogonal to the scanning direction (SC1) of the imaging device.