| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged-particle beam irradiation device and an X-ray irradiation device capable of preventing generation of ozone caused by charged- particle beam irradiation or X-ray irradiation. SOLUTION: In this charged-particle beam irradiation device, a gas container in which gas including no oxygen is filled is installed on an irradiation route of a charged-particle beam, and the charged-particle beam irradiated from a charged-particle beam irradiation part is irradiated onto an object to be irradiated through the gas container. In this X-ray irradiation device, a similar gas container is also installed. |
