| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a module for fluid control, connected in-line to a corrosive fluid flow circuit. SOLUTION: The module 10 for fluid control is connected in-line to a fluid flow circuit through which a chemically corrosive or ultra high purity fluid flows in liquid or gaseous form and it controls the amount, pressure and volume of the fluid flow. The module 10 automatically makes adjustment or performs 'calibration', according to the change of barometric pressure or in order to correct the deviation between multiple pressure sensors 20 within the module 10. The module 10 can also make rough, swift adjustment of a control valve 22, which means that it has a function that swiftly controls the amount of flow within a desired range.</p> |
