GAS LASER OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable gas laser oscillator that can previously realize maintenance of a vacuum-sealed portion by easily sensing a minute vacuum leak giving almost no influence on a laser output during operation of the gas laser oscillator. SOLUTION: This gas laser oscillator comprises a laser gas pressure control unit for controlling the laser gas pressure in a laser gas chamber to the constant value, a laser gas supply electro-magnetic valve for supplying the laser gas to the laser gas chamber from a laser gas bomb to maintain the laser in the laser gas chamber to the constant value and an alarm display control unit for sensing that the open/close period of the laser gas supply electro-magnetic valve becomes longer than the ordinary value and then displaying an alarm.