| 摘要 |
PROBLEM TO BE SOLVED: To realize a vacuum ultraviolet optical member that is low in vacuum ultraviolet absorption, low in deliquescence and in cleavability. SOLUTION: Halides of alkaline metals, such as Li, Na, Cs and the like are mixed with other halides of alkaline earth metals such as Ca, Sr, Ba, Mg, Zn, and the like, are mixed together at a ratio of 1:1, and the mixture is sintered for growing a fluoride crystal of AMF3 perovskite structure. This crystal is worked into an optical member base such as a lens, mirror, a prism or the like. Or the base body of an optical member is coated with the crystal using it as a deposition source. By these processes, an optical part which is low in vacuum ultraviolet absorption properties and superior in durability can be obtained.
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