发明名称 METHOD FOR MANUFACTURING OPTICAL DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To integrally form at least one projecting arcuate surface on the front surface of an optical material. SOLUTION: At least one projecting arcuate surface 12 analogous to a projecting arcuate surface of a photoresist film is formed on the front surface of the optical material by forming at least one projecting arcuate film 42a by exposure, development on the photoresist film 42 formed on the front surface of the optical material 40 and etching the front surface of the optical material and the photoresist film. As the method for forming the projecting arcuate surface 12 by the photolithography method, exposure intensity is changed gradually from the center of a pattern of a circular or elliptic pattern toward the periphery in an exposure stage for exposing the pattern described above on the photoresist film.</p>
申请公布号 JP2001242632(A) 申请公布日期 2001.09.07
申请号 JP20010007061 申请日期 2001.01.15
申请人 MITSUI CHEMICALS INC 发明人 EDA AKIRA
分类号 G02B5/10;G02B3/00;G02F1/37;G03F1/54;G03F7/20;H01S3/06;(IPC1-7):G03F7/20;G03F1/08 主分类号 G02B5/10
代理机构 代理人
主权项
地址