FLUID HEATER

摘要

PURPOSE: To provide a fluid heater capable of suppressing a generation of particles in a route in which a fluid to be heated flows and being used to heat a gas or the fluid in a substrate processing device of a semiconductor substrate or a liquid crystal substrate. CONSTITUTION: The fluid heater comprises a heating bent tube 10 formed in a tubular state of a conductive material and connected at both ends to communicate with piping in which the fluid to be heated flows, a coil 14 arranged at an outside of the bent tube and wound to surround the bent tube, and a power source 16 for supplying a high-frequency current to the coil.