METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of easily manufacturing, at low cost, a piezoelectric element having higher characteristics, an excellent junction strength between piezoelectric material and electrode and higher reliability. SOLUTION: In the method of manufacturing piezoelectric elements comprising piezoelectric material and electrodes provided on this material, the Cu electrode is used as electrodes and Cu electrode and piezoelectric material are bonded directly under the contact condition by holding these elements in the range of 500 to 700 deg.C.