| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for forming a heater consisting of a metallic thin film, etc., having satisfactory adhesion property onto an optical waveguide formed of a high-polymer material. SOLUTION: After the high-polymer optical waveguide consisting of a lower clad layer, core and upper clad layer is formed, the surface of the upper clad 1 is subjected to a surface treatment 13 through sputter etching using an etching gas of any one selected from gaseous argon (Ar), gaseous oxygen (O2), gaseous nitrogen (N2), a gaseous mixture composed of the argon (Ar) and the oxygen (O2) and a gaseous mixture composed of argon (Ar) and nitrogen (N2), and thereafter the heater of the thin film is formed on the upper clad layer.</p> |
