| 摘要 |
A substrate temperature measuring method, a substrate processing method, substrate temperature measuring equipment and semiconductor manufacturing equipment that can measure more accurately a temperature of and can process more precisely a substrate than in existing ones are provided. Electric energy is converted into electromagnetic wave energy, an electromagnetic wave involving the converted electromagnetic wave energy being irradiated on a resonant circuit disposed on a substrate. A voltage or a current involving electric energy is detected to detect a resonance frequency of a resonant circuit. From the detected resonance frequency, a temperature of a substrate is obtained. Thereby, by making use of at least one resonant circuit disposed on a substrate, a temperature of the substrate can be measured with high precision. |
