Z-theta INDEPENDENT MOTION UNIT

摘要

PROBLEM TO BE SOLVED: To provide a Z-θindependent motion unit realizing a compact and low cost structure. SOLUTION: The Z-θindependent motion unit has a hollowθmotion actuator 3 and a hollow Z axis motion actuator 4 arranged in a concentric manner and a shaft portion 22 of a Z-θshaft 2 passes the through holes 31, 41 extended through at the centers. The Z axis motion actuator 4 provides a cam conversion mechanism 44 consisting of a cylindrical cam 45 and a cam follower 46, as a mechanism to convert a motor rotation into a reciprocated linear motion. The Z-θshaft 2 convert a rotation motion into a reciprocated linear motion independently so that it is connected to the motion actuator 3 by means of a ball bushing 24 and a guide shaft 25.