发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To reduce the manufacturing cost of a CSP semiconductor device of a wafer level and increase the reliability by securing enough strength from a re-wiring to a post to an external terminal. SOLUTION: An adhered layer 15, Cu seed layer 16, and re-wiring layer 18 formed by a Cu plating method are formed through a protective insulation film 13 and polyimide layer 14, both of which have an opening in a pad 12 region of a final wiring. In a specified area on the re-wiring layer 18, a first metal ball formed of a high temperature solder is mounted and welded to form a globular post 20. On an exposed head of the post surrounded by sealing resin 21 has its upper face polished and a side face arched, a second metal ball formed of solder is mounted and welded to form the external terminal 22.</p>
申请公布号 JP2001244287(A) 申请公布日期 2001.09.07
申请号 JP20000055864 申请日期 2000.03.01
申请人 SEIKO EPSON CORP 发明人 MOROZUMI YUKIO
分类号 H01L23/52;H01L21/3205;H01L21/60;H01L23/12;(IPC1-7):H01L21/60;H01L21/320 主分类号 H01L23/52
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