STAGE DEVICE, STAGE DRIVING METHOD, EXPOSURE DEVICE AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a stage device, an exposure device, a stage driving method and an exposure method, simplifying device constitution by making a stage small and lightweight in the stage device, and dispensing with an encoder or the like exclusively used for the commutation of an electromagnetic force motor for driving the stage. SOLUTION: This stage device 100 is provided with the stage ST movable in a first direction (X-direction), the electromagnetic force motor 40 for driving the stage ST in the first direction, a laser interferometer system 20 for measuring the position of the stage ST, and a control means 50 for controlling the electromagnetic force motor 40. The control means 50 uses the measured value of the laser interferometer system 20 for the commutation of the electromagnetic force motor 40.