| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heating resistor which is suitably used for drying or sputtering mainly in semiconductor industries, having superior features for temperature controllability and uniformity on a heating surface. SOLUTION: In this invention, there is formed a heating element on the surface of a ceramic plate or in it. Bottomed holes are drilled toward a heating surface from far side of a heated object surface, and also temperature sensing elements are installed in the bottomed holes, thereby forming the ceramic heating resistor by filling heat resistance resins or ceramics.
|
