发明名称 |
SCANNING ELECTRON MICROSCOPE |
摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope which produces scanning image with high space resolution at a low-acceleration voltage area. SOLUTION: A top magnetic pole of an objective lens is electrically insulated against the part of the lens other than that for the top magnetic lens, and a scanning electron microscope with positive voltage applied accelerating a primary electron beam post-deflection is provided.
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申请公布号 |
JP2001243904(A) |
申请公布日期 |
2001.09.07 |
申请号 |
JP20010031687 |
申请日期 |
2001.02.08 |
申请人 |
HITACHI LTD |
发明人 |
TODOKORO HIDEO;ESUMI MAKOTO |
分类号 |
H01J37/141;H01J37/28;(IPC1-7):H01J37/141 |
主分类号 |
H01J37/141 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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