| 摘要 |
<p>One or more lenses (10) are revolved around an axis (12) normal to a flat scan plane (21) to provide a scanning mechanism for exposure onto (or reading off of) a flat plane of a substrate (20). The data for the image is remapped electronically or in software to compensate for the curved path (13) of the focal point of the scanning lens. combined with a conventional scanning mechanism (35, 40) in a second axis, an area scan is accomplished inexpensively on a flat plane.</p> |
