ELECTROSTATIC CHUCK AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck which employs aluminum nitride ceramics for a base material and works with Coulomb force, to prevent a dispersion of attraction responsibility by preventing its degradation. SOLUTION: An electrostatic chuck comprises the base and an electrostatic chuck electrode buried in the base. The electrostatic chuck electrode comprises a main body consisting of molybdenum metal or molybdenum alloy, and an electroconductive coating which substantially contains no molybdenum element and covers the main body.