发明名称 PROBE FOR HIGH FREQUENCY SIGNAL
摘要 PROBLEM TO BE SOLVED: To provide a probe which enables its characteristic impedance to be accurately adjusted to a desirable value with a few trials. SOLUTION: A probe comprises; 1) a signal terminal connected to a signal electrode of a circuit to be measured; 2) the first line with one or more of a first domain for attaching one end of a chip capacitor connected to the above signal terminal; 3) the second line which is connected to an opposite end to the connected end of the above first line, provides a junction with the measuring apparatus on the other end, and has an impedance to match with a characteristic impedance of the measuring apparatus; 4) an earth terminal connected to an earth electrode of the measured circuit; 5) and an earth conductor with corresponds to the above first domain one by one, is connected to the above earth terminal and provides one or more of the second domain for attaching the rest of the end of the chip capacitor; and is characterized in that a chip capacitor with a predetermined capacitance is attached in a predetermined location in the above first and second domains so that the impedance in a view from the measured circuit side to the probe side can be a desired value.
申请公布号 JP2001244308(A) 申请公布日期 2001.09.07
申请号 JP20000049404 申请日期 2000.02.25
申请人 MITSUBISHI ELECTRIC CORP;MITSUBISHI MATERIALS CORP 发明人 INOUE AKIRA;KATO TAKAYUKI;ASO TAKESHI;IWAMOTO TAKAFUMI;SUETSUGU TAKUZO
分类号 G01R31/26;G01R1/06;G01R1/067;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R31/26
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