| 摘要 |
PROBLEM TO BE SOLVED: To provide a treating device of substrates, which can select a plurality of or one treatment that are carried out to the substrates for efficiently and reliably performing the treatment. SOLUTION: Around a delivery mechanism 1 of the substrate, several units are arranged while the substrate can be delivered by the delivery mechanism. More specifically, an optical treatment unit 6 applies light of specific wavelength onto the substrate for removing organic matters; a spin treatment unit 7 performs washing treatment with washing liquid while the substrate is being rotated, and dried the substrate that is subjected to washing treatment; a drying treatment unit 8 allows the substrate to be subjected to drying treatment with volatile liquid when the state of the substrate that is dried by the spin treatment unit is insufficient; and an accommodation unit has a loader part 11 for housing untreated substrates and an unloader part 12 for housing treated ones, takes out the untreated substrates from the loader with the delivery mechanism, and house the treated substrates into the unloader part.
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