发明名称 BURN-IN TESTING DEVICE AND CLASSIFICATION METHOD OF DEVICE TO BE TESTED
摘要 PROBLEM TO BE SOLVED: To obtain a much information on a semiconductor device determined as a defective, in a burn-in testing device for executing heating test of the semiconductor device. SOLUTION: This burn-in testing device 1 is equipped with a test controller part 11 for forming a test result data file 11a for showing a test result of the semiconductor device, and for outputting the file to a classified data file forming part 13, and the classified data file forming part 13 for classifying the semiconductor device by referring the test result data file 11 following a classification condition data file 12b memorized in a memory 12. The classified data file forming part 13 analyzes the test result on plural test items by a prescribed logic operation, to classify the semiconductor device.
申请公布号 JP2001242215(A) 申请公布日期 2001.09.07
申请号 JP20000051666 申请日期 2000.02.28
申请人 ANDO ELECTRIC CO LTD 发明人 KATO NAOKI
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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