| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner which can be reduced in energy consumption by reducing the capacities of the cooler and heater of a temperature controller, and at the same time, by which temperature can be controlled with accuracy. SOLUTION: The temperature controller 13, which adjusts the temperature in a chamber 12 surrounding a body 11 of the aligner, introduces high- temperature air discharged from the chamber 12 to the cooler 21, and at the same time, makes the air to flow to a by-pass pipe 24a for which flow rate adjustment is performed by means of a regulator 26. Then the controller 13 raises the temperature of cooled air from the cooler 21, by mixing the air with the high-temperature air flowing through the by-pass pipe 24a, adjusts the temperature of the air to a prescribed value by means of a base heater 22 and a high-sensitivity heater 23, and supplies the temperature-adjusted air to the chamber 12. The controller 13 maintains the atmosphere in the chamber 12 at a fixed temperature, by radiating the heat generated from the heat generating source of the body 11 by means of the air flow adjusted to the prescribed temperature and supplied to the chamber 12.
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