摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic resonance force microscope capable of providing sample information on the surface of a sample or a micro area on the surface of the sample while permitting wide area scanning. SOLUTION: This magnetic field generating device 1 for the magnetic resonance force microscope 12 is provided with a solenoid coil 2 and a cylindrical magnetic substance 5 of high permeability translational along the center symmetry axis of the coil 2. In the magnetic dipole magnetic field generated by the magnetic field generating device 1, magnetic field intensity larger than the maximum magnetic field generated by the coil 2 is obtained without impairing the spatial uniformity of the magnetic field. The sample 39 is set into the magnetic dipole magnetic field and irradiated with high frequency by an RF coil 20 to make magnetic moment of the sample 39 magnetically resonant. A cantilever 18 is flexurally vibrated at the magnetic field gradient formed by a magnetic chip 19 through the magnetic resonance, and the flexural vibration is detected through an optical fiber 25. The magnetic field generating device 1 is moved in a narrow scanning area by a piezoelectric element 14, and the sample 39 is moved in a wide range by a coarse adjustment driving part 37.
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