| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric material element that can obtain better- displacement pressure, a method of manufacturing the same element and an ink jet recording head provided with the same piezoelectric material element. SOLUTION: This piezoelectric material element 1 comprises a substrate 2, a lower electrode 3 formed on the substrate, Pb(Zr1-xTix)O3 (0<x<1), piezoelectric material films 4, 5, 6 containing, as the basic ingredient, a valance compensation type perovskite expressed with a general expression Pb(A1/3B2/3)O3 (A and B indicate metal elements which can form the valance compensation type perovskite) and an upper electrode 8 formed on the piezoelectric material film. In the piezoelectric material film, concentration of A and/or B changes in the thickness direction of the piezoelectric material film and the maximum concentration of A and/or B is indicated in the region within 60% from the upper electrode side in the thickness direction of the piezoelectric material film. This material is just suitable for ink jet recording head. |
