FINE STRUCTURE AND METHOD FOR MANUFACTURING VIDEO DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide method for manufacturing a fine structure having stable quality at a high yield which is capable of controlling a thickness direction of the structure with high accuracy when the fine structure is manufactured by mold transfer. SOLUTION: A resist layer 75 controlled in thickness by spin coating is formed on a substrate and a spacer 70 is formed by a photolithography technique around a region 23 where the manufacture of a chip is planned. The thickness of a resin 60 molded by applying a transfer mold 69 to the spacer 70 may controlled with the high accuracy. The manufacture of the chip 22 molded of the fine structure by the mold transfer is made possible and the yield may be improved.