| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide coupler having the relaxed complexity and precision and its manufacturing method. SOLUTION: The optical waveguide coupler is composed of plural slender and narrow optical waveguide strips 2, and each of the optical waveguide strips 2 consists of a front area 3, a central area 4 and a coupling area 5. Each central area 4 is provided with transition areas 6 and 7 to the corresponding areas 3 or 5. An interval 9 provided in the front area 3 between two adjacent strips 2 is lager than the thickness of the narrow strip 2. Plural fronts of plural front areas 3 and plural fronts of plural coupling areas 5 are formed so as to become smooth as much as possible, and all strips form a stack in the coupling area 5. Plural intervals are plural pits obtained by etching an Si substrate with aid of DRIE etching treatment. |
