| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for converting a distorted wave front to a planar wave front, and for converting the planar wave front to the distorted wave front, and on the other hand, for effectively compensating a 5λ/mm phase deviation slope extent, and to provide the method and device for converting the distorted wave front to the planar wave front, and for converting oppositely, and on the other hand, for calculating modular n2π(or nλ) phase deviation, and further, to provide the method and device for proqramming an active mirror for easy handling and manufacturing and relatively good cost performance. SOLUTION: The active mirror 12 contains arrangement of nearly 40 thousands pieces of individual minute faces, and respective minute faces 54 of the active mirror are movable independently along respective optical paths substantially parallel ranging to a distance of nearly 4/10 micro-meter. Since visible rays (1λ) of one wavelength is nearly 8/10 micro-meter, by individual motion of respective minute faces, the phase deviation of nearly whole one wavelength is compensated. |
