| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for inspecting a surface of an object 106. SOLUTION: This method includes moving operation between the object and the device inspecting the surface of the object for irradiating the surface of the object with a light radiation. This radiation is carried out in different imaging areas 108, 110 of the object surface respectively, so that a characteristic of at least one of the respective radiations is different from that in the other imaging area. For producing image formation from the same surface area of the object by the different respective radiations, an image is formed from the imaging area, and image information of the same surface area obtained from the different imaging areas are compared and/or combined with each other for producing surface inspection information. |
