| 摘要 |
PROBLEM TO BE SOLVED: To prevent destruction of charged particle sources due to discharge or the like even in the case of a drastic change of accelerating voltage in a charged particle accelerator. SOLUTION: When an accelerating voltage of the charged particle beam accelerator is changed to a great extent, a specific interstage voltage of a multistage accelerating tube gets so large at its changing process as to bring about discharge, if an accelerating voltage and a control voltage are independently controlled. By changing the control voltage geared to the change of the accelerating voltage, a voltage of each step of the multistage accelerating tube is controlled not to go beyond the upper limit.
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