| 摘要 |
PROBLEM TO BE SOLVED: To prevent discrimination error caused by contact failure of an inspection probe. SOLUTION: This circuit board inspection device 1 is equipped with a contact- type first inspection probe 3 and a second inspection probe 4, moving mechanisms 5a, 5b for moving both inspection probes 3, 4 to inspection positions to be contacted, a measuring part 6 for measuring a resistance value between the inspection positions through both inspection probes 3, 4 moved to the inspection positions, and a control part 7 for controlling movement of both inspection probes 3, 4 by the moving mechanism 5a, 5b and executing prescribed electric inspection based on the resistance value measured by the measuring part 6. The measuring part 6 measures at least one of the capacitance between either of both inspection positions after movement of both inspection probes 3, 4 and a reference electrode 2b, and the capacitance between both inspection positions, and the control part 7 discriminates the contact state between the inspection probes 3, 4 and the inspection positions based on the measurement result.
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