| 摘要 |
<p>A two-phase flat linear motor of high speed, high thrust and high efficiency used for IC handlers or the like is disclosed. A platen (50) is a laminated body in which a plurality of magnetic thin sheets (T) are laminated in the X-axis direction. Pole teeth (KAX, KA'X, KBX, KB'X) of an X-axis mover (60X) are arranged flat in the Y-axis direction with equal spatial phases with respect to a closest dot (D) in the Y-axis direction, while they are repetitively arranged every one dot pitch in the X-axis direction. The pole teeth contained within one pitch are so staggered that the with spatial phases with respect to a closest dot (D) in the X-axis direction are mutually different by 1/4 pitch. With this staggered arrangement, the X-axis mover (60X) can move in X-axis direction. Consequently, the laminated body of the magnetic thin plates can be utilized as a platen.</p> |
