发明名称 |
Thermally stable layer system used for reflecting extreme UV rays consists of layer pairs made up of a barrier layer of molybdenum silicide between a molybdenum layer and a silicon layer |
摘要 |
Thermally stable layer system consists of a number of thin layer pairs lying over each other on a substrate, each layer comprising a molybdenum and a silicon layer with a barrier layer of molybdenum silicide between them. Preferred Features: The number of layer pairs is in the region of 40-60. One layer pair has a thickness of 6.8 nm. The barrier layer is 0.7 nm thick. The layers are applied by PVD.
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申请公布号 |
DE10011548(A1) |
申请公布日期 |
2001.09.06 |
申请号 |
DE20001011548 |
申请日期 |
2000.02.28 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
YULIN, SERGEY;FEIGL, TORSTEN;KAISER, NORBERT |
分类号 |
G02B5/08;G02B5/26;G02B5/28;G03F7/20;(IPC1-7):G02B5/26 |
主分类号 |
G02B5/08 |
代理机构 |
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